Code of Federal Regulations Title 40. Protection of Environment 40 CFR Pt. 98, Subpt. I, Tbl. I-5 Table I–5 to Subpart I of Part 98—Default Emission Factors (1-U ij ) for Gas Utilization Rates (U ij ) and By-Product Formation Rates (B ijk ) for MEMS Manufacturing

Current as of October 02, 2022 | Updated by FindLaw Staff

Table I-5 To Subpart I of Part 98—Default Emission Factors (1–U_ij) for Gas Utilization Rates (U_ij) and By-Product Formation Rates (B_ijk) for MEMS Manufacturing
Process type factors	Process gas i
	CF₄	C₂F₆	CHF₃	CH₂F₂	C₃F₈	c - C₄F₈	NF₃ Remote	NF₃	SF₆	C₄F_6a	C₅F_8a	C₄F₈O_a
Etch 1-U_i	0.7	¹0.4	¹0.4	¹0.06	NA	¹0.2	NA	0.2	0.2	0.1	0.2	NA
Etch BCF₄	NA	¹0.4	¹0.07	¹0.08	NA	0.2	NA	NA	NA	¹0.3	0.2	NA
Etch BC₂F₆	NA	NA	NA	NA	NA	0.2	NA	NA	NA	¹0.2	0.2	NA
CVD Chamber Cleaning 1-U_i	0.9	0.6	NA	NA	0.4	0.1	0.02	0.2	NA	NA	0.1	0.1
CVD Chamber Cleaning BCF₄	NA	0.1	NA	NA	0.1	0.1	²0.02	²0.1	NA	NA	0.1	0.1
CVD Chamber Cleaning BC₃F₈	NA	NA	NA	NA	NA	NA	NA	NA	NA	NA	NA	0.4
Notes: NA = Not applicable; i.e., there are no applicable default emission factor measurements for this gas. This does not necessarily imply that a particular gas is not used in or emitted from a particular process sub-type or process type.

¹ Estimate includes multi-gas etch processes.

² Estimate reflects presence of low-k, carbide and multi-gas etch processes that may contain a C-containing fluorinated GHG additive.

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Cite this article: FindLaw.com - Code of Federal Regulations Title 40. Protection of Environment 40 CFR Pt. 98, Subpt. I, Tbl. I-5 Table I–5 to Subpart I of Part 98—Default Emission Factors (1-U ij ) for Gas Utilization Rates (U ij ) and By-Product Formation Rates (B ijk ) for MEMS Manufacturing - last updated October 02, 2022 | https://codes.findlaw.com/cfr/title-40-protection-of-environment/cfr-pt-40-98-subpt-i-tbl-i-5/

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Code of Federal Regulations Title 40. Protection of Environment 40 CFR Pt. 98, Subpt. I, Tbl. I-5 Table I–5 to Subpart I of Part 98—Default Emission Factors (1-U ij ) for Gas Utilization Rates (U ij ) and By-Product Formation Rates (B ijk ) for MEMS Manufacturing

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