Code of Federal Regulations Title 40. Protection of Environment 40 CFR Pt. 98, Subpt. I, Tbl. I-17 Table I–17 to Subpart I of Part 98—Expected and Possible By-Products for Electronics Manufacturing

Expected By-products:

CF₄

C₂F₆

CHF₃

CH₂F₂

CH₃F

Use the measured concentration for “X_ksm” in Equation I-18 when available and use one-half of the field detection limit you determined for the fluorinated GHG according to § 98.94(j)(2) for the value of “X_ksm” when the fluorinated GHG is not detected

Use one-half of the field detection limit you determined for the fluorinated GHG according to § 98.94(j)(2) for the value of “X_ksm” in Equation I-18.

Possible By-products:

C₃F₈

C₄F₆

c-C₄F₈

C₅F₈

Use the measured concentration for “X_ksm” in Equation I-18 when available and use one-half of the field detection limit you determined for the fluorinated GHG according to § 98.94(j)(2) for the value of “X_ksm” when the fluorinated GHG is not detected

Assume zero emissions for that fluorinated GHG for the tested stack system.